Focused particle beam-induced processing

نویسندگان

  • Michael Huth
  • Armin Gölzhäuser
چکیده

In light of the success of 3D printing using fused-deposition modeling or higher-resolution variants with lasers applicable to polymers and metals, one may wonder whether an analogous approach exists on the nanometer scale. Indeed it does. With the aid of focused particle beam-induced deposition (FPBID) it is possible to create solid-state structures on the nanoscale. However, in contrast with large-scale 3D printing of plastic or metallic structures, FPBID provides nanomaterials with a wealth of interesting electronic, optical and magnetic properties. Due to this, focused electron beam-induced deposition (FEBID) has experienced a rapid expansion in the breadth of its application fields over the last 10 years.

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عنوان ژورنال:

دوره 6  شماره 

صفحات  -

تاریخ انتشار 2015